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As the feature size of microelectronic circuits is scaling down to nanometer order, the increasing interconnect crosstalk, resistance-capacitance (RC) delay and power consumption can limit the chip performance and reliability. To address these challenges, new low-kdielectric (k < 2) materials need to be developed to replace current silicon dioxide (k = 3.9) or SiCOH, etc. However, existing low-kdielectric materials, such as organosilicate glass or polymeric dielectrics, suffer from poor thermal and mechanical properties. Two-dimensional polymers (2DPs) are considered promising low-kdielectric materials because of their good thermal and mechanical properties, high porosity and designability. Here, we report a chemical-vapor-deposition (CVD) method for growing fluoride rich 2DP-F films on arbitrary substrates. We show that the grown 2DP-F thin films exhibit ultra-low dielectric constant (in plane k = 1.85 and out-of-plane k = 1.82) and remarkable mechanical properties (Young’s modulus > 15 GPa). We also demonstrated the improved performance of monolayer MoS₂field-effect-transistors when utilizing 2DP-F thin films as dielectric substrates. 

Tandem mass spectrometry (MS2) has been employed to elucidate the topology and branching architecture of star-branched polyethers. The polymers were ionized by matrix-assisted laser desorption/ionization (MALDI) to positive ions and dissociated after leaving the ion source via laser-induced fragmentation. The bond scissions caused under MALDI-MS2 conditions occur preferentially near the core-branch joining points due to energetically favorable homolytic and heterolytic bond cleavages near the core and release of steric strain and/or reduction of crowding. This unique fragmentation mode detaches complete arms from the core generating fragment ion series at the expected molecular weight of each branch. The number of fragment ion distributions observed combined with their mass-to-charge ratios permit conclusive determination of the degree of branching and the corresponding branch lengths, as demonstrated for differently branched homo- and mikto-arm polyether stars synthesized via azide-alkyne click chemistry. The results of this study underscore the utility of MS2 for the characterization of branching architecture and branch lengths of (co)polymers with two or more linear chains attached to a functionalized central core.